Hydrogen and ordinary nitrogen gas containing oxygen less than 2 % are mixed and flow into the purification device oxygen remover. The small amount of oxygen is completely reacted to generate water with the excess hydrogen in the palladium catalyst (2H2 + O2 = 2H2O). The residual oxygen is reduced to below 5 ppm;
The water generated is preliminarily removed from the nitrogen gas of having reacted oxygen through a cooler and a refrigerator, and further removed by two dryers, in which the molecular sieves are filled, one of them adsorbing the water and the other subjecting to being desorbed at high temperature after it adsorbs water to saturation. The normal-pressure dew point of the nitrogen gas can finally reach less than -60 ℃.
The gas purified is conveyed through a pure nitrogen tank and then to nitrogen-using spots.